Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 44 - 52
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 34 - 43
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 243 - 249
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 10 - 12
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 217 - 223
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 76 - 84
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 85 - 99
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 145 - 160
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 121 - 131
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 7 - 9
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 13 - 22
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 53 - 61
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 171 - 180
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 23 - 33
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 198 - 205
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 4 - 6
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 181 - 189
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 224 - 234
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 132 - 144
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 62 - 67